검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Assessing the mask clamping ability of a low thermal expansion material chuck Zeuske JR, Vukkadala P, Engelstad RL, Mikkelson AR, Kalkowski G, Risse S, Mueller S Journal of Vacuum Science & Technology B, 28(6), C6E17, 2010 |
| 2 |
Analysis of Coulomb and Johnsen-Rahbek electrostatic chuck performance for extreme ultraviolet lithography Sogard MR, Mikkelson AR, Nataraju M, Turner KT, Engelstad RL Journal of Vacuum Science & Technology B, 25(6), 2155, 2007 |
| 3 |
Distortion of chucked extreme ultraviolet reticles from entrapped particles Ramaswamy V, Engelstad RL, Turner KT, Mikkelson AR, Veeraraghavan S Journal of Vacuum Science & Technology B, 24(6), 2829, 2006 |
| 4 |
Electrostatic chucking for extreme ultraviolet lithography: Simulations and experiments Nataraju M, Sohn J, Veeraraghavan S, Mikkelson AR, Turner KT, Engelstad RL, Van Peski CK, Orvek KJ Journal of Vacuum Science & Technology B, 24(6), 2834, 2006 |
| 5 |
Predicting critical dimension uniformity in advanced electron-beam projection lithography masks Cotte EP, Mikkelson AR, Matesanz O, Engelstad RL, Lovell EG, Reu PL Journal of Vacuum Science & Technology B, 21(6), 3027, 2003 |