화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 Self-aligned double patterning process for subtractive Ge fin fabrication at 45-nm pitch
Milenin AP, Witters L, Barla K, Thean A
Thin Solid Films, 602, 64, 2016
2 Integration aspects of strained Ge pFETs
Witters L, Eneman G, Mitard J, Vincent B, Hikavyy A, Milenin AP, Mertens S, Thean A, Collaert N
Solid-State Electronics, 98, 7, 2014
3 Temperature and RF Current Sensor Wafers for Plasma Etching
Milenin AP, Demand M, Boullart W, Arleo P
Journal of the Electrochemical Society, 159(1), H5, 2012
4 Transfer of sub-30-nm patterns from templates based on supramolecular assemblies
Zschech D, Milenin AP, Scholz R, Hillebrand R, Sun Y, Uhlmann P, Stamm M, Steinhart M, Goesele U
Macromolecules, 40(22), 7752, 2007
5 Plasma etching of proton-exchanged lithium niobate
Hu H, Milenin AP, Wehrspohn RB, Hermann H, Sohler W
Journal of Vacuum Science & Technology A, 24(4), 1012, 2006
6 Formation of the Co/Si(111)7 X 7 interface: AES- and EELS-study
Plusnin NI, Milenin AP, Prihod'ko DP
Applied Surface Science, 166(1-4), 125, 2000