검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Nanoscale patterning using self-assembled polymers for semiconductor applications Guarini KW, Black CT, Milkove KR, Sandstrom RL Journal of Vacuum Science & Technology B, 19(6), 2784, 2001 |
| 2 |
Effects of argon addition to a platinum dry etch process Milkove KR, Coffin JA, Dziobkowski C Journal of Vacuum Science & Technology A, 16(3), 1483, 1998 |
| 3 |
Insight into the Dry-Etching of Fence-Free Patterned Platinum Structures Milkove KR, Wang CX Journal of Vacuum Science & Technology A, 15(3), 596, 1997 |
| 4 |
Lithography and Fabrication Processes for Sub-100 nm Scale Complementary Metal-Oxide-Semiconductor Wind SJ, Taur Y, Lee YH, Mii Y, Viswanathan RG, Bucchignano JJ, Pomerene AT, Sicina RM, Milkove KR, Stiebritz JW, Roy RA, Hu CK, Manny MP, Cohen S, Chen W Journal of Vacuum Science & Technology B, 13(6), 2688, 1995 |
| 5 |
Integrated Approach to Quantum-Dot Fabrication Rishton SA, Lee YH, Milkove KR, Hong JM, Boegli V, Defranza M, Sivan U, Kern DP Journal of Vacuum Science & Technology B, 11(6), 2607, 1993 |