검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Characterization of tunnel-oxide degradation due to plasma field oxide recess in flash memory devices Lee J, Kim DK, Min GJ, Chung I Thin Solid Films, 520(15), 5007, 2012 |
| 2 |
Etching characteristics and modeling for oval-shaped contact Park SC, Lim SH, Shin CH, Min GJ, Kang CJ, Cho HK, Moon JT Thin Solid Films, 515(12), 4923, 2007 |
| 3 |
Chamber maintenance and fault detection technique for a gate etch process via self-excited electron resonance spectroscopy Baek KH, Jung YJ, Min GJ, Kang CJ, Cho HK, Moon JT Journal of Vacuum Science & Technology B, 23(1), 125, 2005 |
| 4 |
Novel technique to enhance etch selectivity of carbon antireflective coating over photoresist based on O-2/CHF3/Ar gas chemistry Hong J, Jeon JS, Kim YB, Min GJ, Ahn TH Journal of Vacuum Science & Technology A, 19(4), 1379, 2001 |