검색결과 : 1건
No. | Article |
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1 |
Optimized tilted c-axis AlN films for improved operation of shear mode resonators DeMiguel-Ramos M, Mirea T, Clement M, Olivares J, Sangrador J, Iborra E Thin Solid Films, 590, 219, 2015 |
No. | Article |
---|---|
1 |
Optimized tilted c-axis AlN films for improved operation of shear mode resonators DeMiguel-Ramos M, Mirea T, Clement M, Olivares J, Sangrador J, Iborra E Thin Solid Films, 590, 219, 2015 |