검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
Substrate and coating defect planarization strategies for high-laser-fluence multilayer mirrors Stolz CJ, Wolfe JE, Mirkarimi PB, Folta JA, Adams JJ, Menor MG, Teslich NE, Soufli R, Menoni CS, Patel D Thin Solid Films, 592, 216, 2015 |
| 2 |
Fabrication and performance of nanoscale ultrasmooth programed defects for extreme ultraviolet lithography Olynick DL, Salmassi F, Liddle JA, Mirkarimi PB, Spiller E, Baker SL, Robinson J Journal of Vacuum Science & Technology B, 26(1), 6, 2008 |
| 3 |
Localized defects in multilayer coatings Stearns DG, Mirkarimi PB, Spiller E Thin Solid Films, 446(1), 37, 2004 |
| 4 |
Evaluation of the cleanliness of the ion-assisted Mo-Si deposition process for extreme ultraviolet lithography Hau-Riege SP, Mirkarimi PB, Walton CC, Sperry V, Larson C Journal of Vacuum Science & Technology B, 21(6), 2466, 2003 |
| 5 |
Practical approach for modeling extreme ultraviolet lithography mask defects Gullikson EM, Cerjan C, Stearns DG, Mirkarimi PB, Sweeney DW Journal of Vacuum Science & Technology B, 20(1), 81, 2002 |
| 6 |
Technique employing gold nanospheres to study defect evolution in thin films Mirkarimi PB, Baker SL, Stearns DG Journal of Vacuum Science & Technology B, 19(3), 628, 2001 |
| 7 |
Effects of smoothing on defect printability at extreme ultraviolet wavelengths Cardinale GF, Ray-Chaudhuri AK, Fisher A, Mangat PSJ, Wasson J, Mirkarimi PB, Gullikson E Journal of Vacuum Science & Technology B, 18(6), 2944, 2000 |
| 8 |
Orientation-Dependence of Elastic Strain-Energy in Hexagonal and Cubic Boron-Nitride Layers in Energetically Deposited BN Films Cardinale GF, Medlin DL, Mirkarimi PB, Mccarty KF, Howitt DG Journal of Vacuum Science & Technology A, 15(1), 196, 1997 |
| 9 |
Substrate Effects in Cubic Boron-Nitride Film Formation Mirkarimi PB, Mccarty KF, Cardinale GF, Medlin DL, Ottesen DK, Johnsen HA Journal of Vacuum Science & Technology A, 14(1), 251, 1996 |
| 10 |
Micromachined Silicon Cantilever Beams for Thin-Film Stress Measurement Cardinale GF, Howitt DG, Clift WM, Mccarty KF, Medlin DL, Mirkarimi PB, Moody NR Thin Solid Films, 287(1-2), 214, 1996 |