검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of laser-induced dissociation of SiH3 radicals in SiH4 plasmas during atomic hydrogen measurements using laser-induced fluorescence by a two-photon excitation Miyazaki K, Mishiro Y, Kajiwara T, Uchino K, Muraoka K, Okada T, Maeda M Journal of Vacuum Science & Technology A, 17(1), 155, 1999 |