검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Composition, structure, microhardness and residual stress of W-Ti-N films deposited by reactive magnetron sputtering Shaginyan LR, Misina M, Zemek J, Musil J, Regent F, Britun VF Thin Solid Films, 408(1-2), 136, 2002 |
| 2 |
Mechanism of the film composition formation during magnetron sputtering of WTi Shaginyan LR, Misina M, Kadlec S, Jastrabik L, Mackova A, Perina V Journal of Vacuum Science & Technology A, 19(5), 2554, 2001 |
| 3 |
Electron-Cyclotron-Resonance Plasma-Enhanced Direct-Current Sputtering Discharge with Magnetic-Mirror Plasma-Confinement Misina M, Setsuhara Y, Miyake S Journal of Vacuum Science & Technology A, 15(4), 1922, 1997 |
| 4 |
Planar Magnetron Sputtering Discharge Enhanced with Radio-Frequency or Microwave Magnetoactive Plasma Musil J, Misina M, Hovorka D Journal of Vacuum Science & Technology A, 15(4), 1999, 1997 |