검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of an Aluminum Etching Process in an Inductively-Coupled Discharge Using Measurements of Discharge Impedance and Current and Voltage Sensors Patrick R, Lee CC, Hilliker SE, Moeller RD Journal of Vacuum Science & Technology A, 15(3), 1250, 1997 |