화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Method for Fabricating a Low-Stress X-Ray Mask Using Annealable Amorphous Refractory Compounds
Dauksher WJ, Resnick DJ, Cummings KD, Baker J, Gregory RB, Theodore ND, Chan JA, Johnson WA, Mogab CJ, Nicolet MA, Reid JS
Journal of Vacuum Science & Technology B, 13(6), 3103, 1995
2 Selective Chemical-Vapor-Deposition of Copper Using (Hfac) Copper(I) Vinyltrimethylsilane in the Absence and Presence of Water
Jain A, Gelatos AV, Kodas TT, Hampdensmith MJ, Marsh R, Mogab CJ
Thin Solid Films, 262(1-2), 52, 1995