검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterisation of ultra-shallow disorder profiles and dielectric functions in ion implanted Si Mohacsi I, Petrik P, Fried M, Lohner T, van den Berg JA, Reading MA, Giubertoni D, Barozzi M, Parisini A Thin Solid Films, 519(9), 2847, 2011 |