검색결과 : 1건
No. | Article |
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1 |
Continuum modeling of post-implantation damage and the effective plus factor in crystalline silicon at room temperature Chan HY, Srinivasan MP, Benistant F, Mok KR, Chan L, Jin HM Thin Solid Films, 504(1-2), 269, 2006 |
No. | Article |
---|---|
1 |
Continuum modeling of post-implantation damage and the effective plus factor in crystalline silicon at room temperature Chan HY, Srinivasan MP, Benistant F, Mok KR, Chan L, Jin HM Thin Solid Films, 504(1-2), 269, 2006 |