검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Metrology of High-Resolution Resist Structures on Insulating Substrates Difabrizio E, Grella L, Luciani L, Gentili M, Baciocchi M, Figliomeni M, Mastrogiacomo L, Maggiora R, Leonard Q, Cerrina F, Molino M, Powderly D Journal of Vacuum Science & Technology B, 11(6), 2456, 1993 |