검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Ultrahigh-resolution pattern using electron-beam lithography HF wet etching Tiron R, Mollard L, Louveau O, Lajoinie E Journal of Vacuum Science & Technology B, 25(4), 1147, 2007 |
| 2 |
Towards a controlled patterning of 10 nm silicon gates in high density plasmas Pargon E, Darnon M, Joubert O, Chevolleau T, Vallier L, Mollard L, Lill T Journal of Vacuum Science & Technology B, 23(5), 1913, 2005 |