화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Comparison of two surface preparations used in the homoepitaxial growth of silicon films by plasma enhanced chemical vapor deposition
Reidy S, Varhue WJ, Lavoie M, Mongeon S, Adams E
Journal of Vacuum Science & Technology B, 21(3), 970, 2003
2 Initial stages of growth of heteroepitaxial yttria-stabilized zirconia films on silicon substrates
Bunt P, Varhue WJ, Adams E, Mongeon S
Journal of the Electrochemical Society, 147(12), 4541, 2000
3 Heteroepitaxial growth of yttria-stabilized zirconia on silicon (100) by reactive sputtering with an electron cyclotron resonance source
Lille J, Varhue WJ, Mongeon S
Journal of the Electrochemical Society, 146(4), 1500, 1999