검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Structure of polycrystalline silicon films deposited at low temperature by plasma CVD on substrates exposed to different plasma Moniruzzaman S, Inokuma T, Kurata Y, Takenaka S, Hasegawa S Thin Solid Films, 337(1-2), 27, 1999 |