검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deposition of thick TEOS PECVD silicon oxide layers for integrated optical waveguide applications Bulla DAP, Morimoto NI Thin Solid Films, 334(1-2), 60, 1998 |
| No. | Article |
|---|---|
| 1 |
Deposition of thick TEOS PECVD silicon oxide layers for integrated optical waveguide applications Bulla DAP, Morimoto NI Thin Solid Films, 334(1-2), 60, 1998 |