검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Influences of Si pillar geometry on SiN-stressor induced local strain Tanaka M, Sadoh T, Morioka J, Kitamura T, Miyao M Applied Surface Science, 254(19), 6226, 2008 |
| 2 |
Local strain evaluation of single crystal Si pillar by micro Raman spectroscopy and photoluminescence Wang D, Nakashima H, Tanaka M, Sadoh T, Miyao M, Morioka J, Kitarnura T Thin Solid Films, 517(1), 31, 2008 |
| 3 |
Characterization of BF2+ ion-implanted layers in strained-silicon/SiGe hetero structures Ishidora Y, Koyama K, Morioka J, Inada T, Sugii N Thin Solid Films, 508(1-2), 284, 2006 |