검색결과 : 1건
No. | Article |
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1 |
Single-crystal SiC thin-film produced by epitaxial growth and its application to micro-mechanical devices Moronuki N, Kojima M, Kakuta A Thin Solid Films, 516(16), 5344, 2008 |
No. | Article |
---|---|
1 |
Single-crystal SiC thin-film produced by epitaxial growth and its application to micro-mechanical devices Moronuki N, Kojima M, Kakuta A Thin Solid Films, 516(16), 5344, 2008 |