검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High-rate deposition of a-SiNx : H for photovoltaic applications by the expanding thermal plasma Kessels WMM, Hong J, van Assche FJH, Moschner JD, Lauinger T, Soppe WJ, Weeber AW, Schram DC, van de Sanden MCM Journal of Vacuum Science & Technology A, 20(5), 1704, 2002 |