검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Influence of substrate bias voltage on the in situ stress measured by an improved optical cantilever technique of sputtered chromium films Gautier C, Moulard G, Chatelon JP, Motyl G Thin Solid Films, 384(1), 102, 2001 |
| 2 |
Improvement of the cantilever beam technique for stress measurement during the physical vapor deposition process Moulard G, Contour G, Motyl G, Gardet G, Courbon M Journal of Vacuum Science & Technology A, 16(2), 736, 1998 |