검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of Energetic Particles on the Residual-Stresses in Nonhydrogenated Amorphous-Carbon Films Deposited on Grounded Substrates by de Magnetron Sputtering Mounier E, Pauleau Y Journal of Vacuum Science & Technology A, 14(4), 2535, 1996 |