검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Profiling of ultrashallow junctions Goeckner MJ, Felch SB, Fang Z, Oberhofer A, Chia VKF, Mount GR, Poulakos M, Keenan WA Journal of Vacuum Science & Technology B, 18(1), 472, 2000 |
| 2 |
Sputtering rate change and surface roughening during oblique and normal incidence O-2(+) bombardment of silicon, with and without oxygen flooding Magee CW, Mount GR, Smith SP, Herner B, Gossmann HJ Journal of Vacuum Science & Technology B, 16(6), 3099, 1998 |