검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Chemical-Mechanical Polishing for Polysilicon Surface Micromachining Yasseen AA, Mourlas NJ, Mehregany M Journal of the Electrochemical Society, 144(1), 237, 1997 |
| No. | Article |
|---|---|
| 1 |
Chemical-Mechanical Polishing for Polysilicon Surface Micromachining Yasseen AA, Mourlas NJ, Mehregany M Journal of the Electrochemical Society, 144(1), 237, 1997 |