검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Ultrashallow profiling using secondary ion mass spectrometry: Estimating junction depth error using mathematical deconvolution Yang MH, Mount G, Mowat I Journal of Vacuum Science & Technology B, 24(1), 428, 2006 |
| 2 |
Analysis of high-k hfO(2) and HfSiO4 dielectric films Nieveen W, Schueler BW, Goodman G, Schnabel P, Moskito J, Mowat I, Chao G Applied Surface Science, 231-2, 556, 2004 |
| 3 |
A correlation of TOF-SIMS and TXRF for the analysis of trace metal contamination on silicon and gallium arsenide Mowat I, Lindley P, McCaig L Applied Surface Science, 203, 495, 2003 |
| 4 |
Surface metal standards produced by ion implantation through a removable layer Schueler BW, Granger CN, McCaig L, McKinley JM, Metz J, Mowat I, Reich DF, Smith S, Stevie FA, Yang MH Applied Surface Science, 203, 847, 2003 |