검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Virtual metrology and feedback control for semiconductor manufacturing processes using recursive partial least squares Khan AA, Moyne JR, Tilbury DM Journal of Process Control, 18(10), 961, 2008 |
| 2 |
Adaptive Extensions to a Multibranch Run-to-Run Controller for Plasma-Etching Moyne JR, Chaudhry N, Telfeyan R Journal of Vacuum Science & Technology A, 13(3), 1787, 1995 |