화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Fabrication of ultra-thin strained silicon on insulator by He implantation and ion cut techniques and characterization
Mu ZQ, Xue ZY, Wei X, Chen D, Zhang M, Di ZF, Wang X
Thin Solid Films, 557, 101, 2014
2 Study of Ge loss during Ge condensation process
Xue ZY, Di ZF, Ye L, Mu ZQ, Chen D, Wei X, Zhang M, Wang X
Thin Solid Films, 557, 120, 2014
3 Influence of He implantation dose on strain relaxation of pseudomorphic SiGe/Si heterostructure
Liu LJ, Xue ZY, Chen D, Mu ZQ, Bian JT, Jiang HT, Wei X, Di ZF, Zhang M, Wang X
Thin Solid Films, 542, 129, 2013