검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Surface and bulk characterization of thermally induced defects during silicon single wafer epitaxy Feichtinger P, Goorsky MS, Muemmler F, Rickborn S, Tran Q, Oster D, Moreland J Journal of Crystal Growth, 237, 1388, 2002 |
| No. | Article |
|---|---|
| 1 |
Surface and bulk characterization of thermally induced defects during silicon single wafer epitaxy Feichtinger P, Goorsky MS, Muemmler F, Rickborn S, Tran Q, Oster D, Moreland J Journal of Crystal Growth, 237, 1388, 2002 |