검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Surface morphology of Kr+-polished amorphous Si layers van den Boogaard AJR, Louis E, Zoethout E, Mullender S, Bijkerk F Journal of Vacuum Science & Technology A, 28(4), 552, 2010 |
| 2 |
Nano-size crystallites in Mo/Si multilayer optics van de Kruijs RWE, Zoethout E, Yakshin AE, Nedelcu I, Louis E, Enkisch H, Sipos G, Mullender S, Bijkerk F Thin Solid Films, 515(2), 430, 2006 |
| 3 |
Laboratory LPP EUV reflectorneter working with non-polarized radiation van Loyen L, Bottger T, Schadlich S, Braun S, Foltyn T, Leson A, Scholze F, Mullender S Applied Surface Science, 252(1), 57, 2005 |
| 4 |
Effect of substrate roughness on Mo/Si multilayer optics for EUVL produced by UHV-e-beam evaporation and ion polishing Kleineberg U, Westerwalbesloh T, Hachmann W, Heinzmann U, Tummler J, Scholze F, Ulm G, Mullender S Thin Solid Films, 433(1-2), 230, 2003 |