검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
다층금속배선공정 중 세정 공정에서 발생하는 텅스텐 부식 신강섭, 이원규 HWAHAK KONGHAK, 39(5), 573, 2001 |
| 2 |
Reliability of built in aluminum interconnection with low-epsilon dielectric based on porous anodic alumina Lazarouk S, Katsouba S, Demianovich A, Stanovski V, Voitech S, Vysotski V, Ponomar V Solid-State Electronics, 44(5), 815, 2000 |