검색결과 : 1건
No. | Article |
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1 |
Planar defect formation mechanism in Ge-rich SiGe-on-insulator substrates during Ge condensation process Hirashita N, Nakaharai S, Moriyama Y, Usuda K, Tezuka T, Sugiyama N, Takagi SI Thin Solid Films, 517(1), 407, 2008 |