검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Growth characteristics of graphene synthesized via chemical vapor deposition using carbon tetrabromide precursor Choi T, Jung H, Lee CW, Mun KY, Kim SH, Park J, Kim H Applied Surface Science, 343, 128, 2015 |
| 2 |
The effects of nitrogen incorporation on the properties of atomic layer deposited Ru thin films as a direct-plateable diffusion barrier for Cu interconnect Mun KY, Hong TE, Cheon T, Jang YJ, Lim BY, Kim S, Kim SH Thin Solid Films, 562, 118, 2014 |
| 3 |
Atomic layer deposition of Ru thin film using N-2/H-2 plasma as a reactant Hong TE, Mun KY, Choi SK, Park JY, Kim SH, Cheon T, Kim WK, Lim BY, Kim S Thin Solid Films, 520(19), 6100, 2012 |