검색결과 : 2건
No. | Article |
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1 |
Comparing XPS on bare and capped ZrN films grown by plasma enhanced ALD: Effect of ambient oxidation Muneshwar T, Cadien K Applied Surface Science, 435, 367, 2018 |
2 |
Probing initial-stages of ALD growth with dynamic in situ spectroscopic ellipsometry Muneshwar T, Cadien K Applied Surface Science, 328, 344, 2015 |