화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Influence of silane flow on structural, optical and electrical properties of a-Si : H thin films deposited by hot wire chemical vapor deposition (HW-CVD) technique
Jadkar SR, Sali JV, Musale DV, Kshirsagar ST, Takwale MG
Solar Energy Materials and Solar Cells, 71(2), 153, 2002
2 Properties of diamond films grown from CH4-CF4-H-2 gas mixture using the hot-filament chemical vapor deposition technique
Musale DV, Pavaskar NR, Kshirsagar ST
Thin Solid Films, 422(1-2), 20, 2002
3 The role of hydrogen dilution of silane and phosphorus doping on hydrogenated microcrystalline silicon (mu c-Si : H) films prepared by hot-wire chemical vapor deposition (HW-CVD) technique
Jadkar SR, Sali JV, Takwale MG, Musale DV, Kshirsagar ST
Thin Solid Films, 395(1-2), 206, 2001
4 Effect of coupling of radio-frequency plasma on the growth of diamond films in a hot filament reactor
Pai MP, Musale DV, Kshirsagar ST, Mitra A, Sainkar SR
Thin Solid Films, 322(1-2), 167, 1998