검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of underlying interlevel dielectric films on extrusion formation in aluminum interconnects Chen F, Li BZ, Sullivan TD, Gonzalez CL, Muzzy CD, Lee HK, Levy MD, Dashiell MW, Kolodzey J Journal of Vacuum Science & Technology B, 18(6), 2826, 2000 |