검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Titanium-nitride self-encapsulation of Cu and Ag films on silicon dioxide Adams D, Laursen T, Alford TL, Mayer JW Thin Solid Films, 308-309, 448, 1997 |
| 2 |
Passivation of Cu via Refractory-Metal Nitridation in an Ammonia Ambient Adams D, Alford TL, Theodore ND, Russell SW, Spreitzer RL, Mayer JW Thin Solid Films, 262(1-2), 199, 1995 |