검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Novel chemical precursors and novel CVD strategies enabling low temperature epitaxy of Si and Si:C alloys Bauer M, Thomas SG Thin Solid Films, 518, S200, 2010 |
| No. | Article |
|---|---|
| 1 |
Novel chemical precursors and novel CVD strategies enabling low temperature epitaxy of Si and Si:C alloys Bauer M, Thomas SG Thin Solid Films, 518, S200, 2010 |