검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Navolak-diazonaphthoquinone resists: The central role of phenolic strings Reiser A, Yan ZL, Han YK, Kim MS Journal of Vacuum Science & Technology B, 18(3), 1288, 2000 |
| 2 |
Mechanism of phenolic polymer dissolution: Importance of acid-base equilibria Flanagin LW, McAdams CL, Hinsberg WD, Sanchez IC, Willson CG Macromolecules, 32(16), 5337, 1999 |
| 3 |
Effect of hydrogen acceptors on pK(a) of phenolic resins : Link to dissolution inhibition Yan ZL, Reiser A Macromolecules, 31(22), 7723, 1998 |
| 4 |
Length of phenolic strings in dissolution inhibition resists Han YK, Reiser A Macromolecules, 31(25), 8789, 1998 |
| 5 |
The Mechanism of Phenolic Polymer Dissolution - A New Perspective Tsiartas PC, Flanagin LW, Henderson CL, Hinsberg WD, Sanchez IC, Bonnecaze RT, Willson CG Macromolecules, 30(16), 4656, 1997 |
| 6 |
Acid-Diffusion Suppression in Chemical Amplification Resists by Controlling Acid-Diffusion Channels in Base Matrix Polymers Yoshimura T, Shiraishi H, Terasawa T, Okazaki S Journal of Vacuum Science & Technology B, 14(6), 4216, 1996 |