검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Observation and evaluation of flaked particle behavior in magnetically enhanced reactive ion etching equipment using a dipole ring magnet Moriya T, Nagaike H, Denpoh K, Morimoto T, Aomori M, Kawaguchi S, Shimada M, Okuyama K Journal of Vacuum Science & Technology B, 22(4), 1688, 2004 |