검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
A novel statistical metrology framework for identifying sources of variation in oxide chemical-mechanical polishing Divecha RR, Stine BE, Ouma DO, Chang EC, Boning DS, Chung JE, Nakagawa OS, Aoki H, Ray G, Bradbury D, Oh SY Journal of the Electrochemical Society, 145(3), 1052, 1998 |