검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High temperature platinum etching using Ti mask layer Kim HW, Ju BS, Nam BY, Yoo WJ, Kang CJ, Ahn TH, Moon JT, Lee MY Journal of Vacuum Science & Technology A, 17(4), 2151, 1999 |
| No. | Article |
|---|---|
| 1 |
High temperature platinum etching using Ti mask layer Kim HW, Ju BS, Nam BY, Yoo WJ, Kang CJ, Ahn TH, Moon JT, Lee MY Journal of Vacuum Science & Technology A, 17(4), 2151, 1999 |