검색결과 : 1건
No. | Article |
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1 |
Atmospheric pressure chemical vapor deposition mechanism of Al2O3 film from AlCl3 and O-2 Nasution I, Velasco A, Kim H Journal of Crystal Growth, 311(2), 429, 2009 |
No. | Article |
---|---|
1 |
Atmospheric pressure chemical vapor deposition mechanism of Al2O3 film from AlCl3 and O-2 Nasution I, Velasco A, Kim H Journal of Crystal Growth, 311(2), 429, 2009 |