화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Comparison of electrical properties of silicon-on-insulator structures fabricated with use of hydrogen slicing and BESOI
Antonova IV, Nikolaev DV, Naumova OV, Popov VP
Electrochemical and Solid State Letters, 7(3), F21, 2004
2 Properties of silicon oversaturated with implanted hydrogen
Popov VP, Tyschenko IE, Safronov LN, Naumova OV, Antonova IV, Gutakovsky AK, Talochkin AB
Thin Solid Films, 403-404, 500, 2002