검색결과 : 1건
No. | Article |
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Imaging Integrated-Circuit Dopant Profiles with the Force-Based Scanning Kelvin Probe Microscope Hochwitz T, Henning AK, Levey C, Daghlian C, Slinkman J, Never J, Kaszuba P, Gluck R, Wells R, Pekarik J, Finch R Journal of Vacuum Science & Technology B, 14(1), 440, 1996 |