검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Trench etch processes for dual damascene patterning of low-k dielectrics Jiang P, Celii FG, Dostalik WW, Newton KJ, Sakima H Journal of Vacuum Science & Technology A, 19(4), 1388, 2001 |
| No. | Article |
|---|---|
| 1 |
Trench etch processes for dual damascene patterning of low-k dielectrics Jiang P, Celii FG, Dostalik WW, Newton KJ, Sakima H Journal of Vacuum Science & Technology A, 19(4), 1388, 2001 |