검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Impact of nitrogen implantation into polysilicon followed by drive-in process on gate oxide integrity Cho BJ, Ko LH, Nga YA, Chan LH Journal of the Electrochemical Society, 146(11), 4259, 1999 |
| No. | Article |
|---|---|
| 1 |
Impact of nitrogen implantation into polysilicon followed by drive-in process on gate oxide integrity Cho BJ, Ko LH, Nga YA, Chan LH Journal of the Electrochemical Society, 146(11), 4259, 1999 |