검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Ni-silicide precursor for gate electrodes Ishikawa M, Muramoto I, Machida H, Imai S, Ogura A, Ohshita Y Thin Solid Films, 515(12), 4980, 2007 |
| 2 |
Chemical vapor deposition of NiSi using Ni(PF3)(4) and Si3H8 Ishikawa M, Muramoto I, Machida H, Imai S, Ogura A, Ohshita Y Thin Solid Films, 515(22), 8246, 2007 |