검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Surface dependent electron and negative ion density in inductively coupled discharges Hebner GA, Blain MG, Hamilton TW, Nichols CA, Jarecki RL Journal of Vacuum Science & Technology A, 17(6), 3172, 1999 |
| 2 |
Positive ion species in high-density discharges containing chlorine and boron-trichloride Woodworth JR, Nichols CA, Hamilton TW Journal of Vacuum Science & Technology A, 16(6), 3235, 1998 |
| 3 |
Ion energy distribution functions in inductively coupled radio-frequency discharges - Mixtures of Cl-2/BCl3/Ar Nichols CA, Woodworth JR, Hamilton TW Journal of Vacuum Science & Technology A, 16(6), 3389, 1998 |
| 4 |
Ion Distribution-Functions in Inductively-Coupled Radio-Frequency Discharges in Argon-Chlorine Mixtures Woodworth JR, Riley ME, Miller PA, Nichols CA, Hamilton TW Journal of Vacuum Science & Technology A, 15(6), 3015, 1997 |
| 5 |
Ionized Physical Vapor-Deposition of Cu for High-Aspect-Ratio Damascene Trench Fill Applications Nichols CA, Rossnagel SM, Hamaguchi S Journal of Vacuum Science & Technology B, 14(5), 3270, 1996 |