검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Experimental investigation of high Si/Al selectivity during anisotropic etching in tetra-methyl ammonium hydroxide Pandy A, Landsberger LM, Nikpour B, Paranjape M, Kahrizi M Journal of Vacuum Science & Technology A, 16(2), 868, 1998 |