화학공학소재연구정보센터
검색결과 : 29건
No. Article
1 Pad flattening ratio, coefficient of friction and removal rate analysis during silicon dioxide chemical mechanical planarization
Lee H, Zhuang Y, Sugiyama M, Seike Y, Takaoka M, Miyachi K, Nishiguchi T, Kojima H, Philipossian A
Thin Solid Films, 518(8), 1994, 2010
2 High quality gate dielectric film on poly-silicon grown at room temperature using UV light excited ozone
Kameda N, Nishiguchi T, Morikawa Y, Kekura M, Nonaka H, Ichimura S
Journal of the Electrochemical Society, 154(9), H769, 2007
3 Active state of tungsten oxides on WO3/ZrO2 catalyst for steam reforming of dimethyl ether combined with CuO/CeO2
Oka K, Nishiguchi T, Kanai H, Utani K, Imamura S
Applied Catalysis A: General, 309(2), 187, 2006
4 Catalytic steam reforming of ethanol to produce hydrogen and acetone
Nishiguchi T, Matsumoto T, Kanai H, Utani K, Matsumura Y, Shen WJ, Imamura S
Applied Catalysis A: General, 279(1-2), 273, 2005
5 Steam reforming of methanol over Cu/CeO2/ZrO2 catalysts
Oguchi H, Nishiguchi T, Matsumoto T, Kanai H, Utani K, Matsumura Y, Imamura S
Applied Catalysis A: General, 281(1-2), 69, 2005
6 Lateral epitaxial overgrowth of 3C-SiC on Si substrates by CVD method
Sugishita S, Shoji A, Mukai Y, Nishiguchi T, Michikami K, Issiki T, Ohshima S, Nishino S
Materials Science Forum, 483, 177, 2005
7 Suppression mechanism of double positioning growth in 3C-SiC(111) crystal by using an off-axis Si(110) substrate
Nakamura M, Isshiki T, Nishiguchi T, Nishio K, Ohshima S, Nishino S
Materials Science Forum, 483, 181, 2005
8 Influence of substrate roughness on the formation of defects in 3C-SiC grown on Si(110) substrate by hetero-epitaxial CVD method
Isshiki T, Nakamura M, Nishiguchi T, Nishio K, Ohshima S, Nishino S
Materials Science Forum, 483, 185, 2005
9 Suppression of the twin formation in CVD growth of (111) 3C-SiC on (110) Si substrate
Nishiguchi T, Nakamura M, Nishio K, Isshiki T, Ohshima S, Nishino S
Materials Science Forum, 483, 193, 2005
10 Steam reforming of dimethyl ether over H-mordenite-Cu/CeO2 catalysts
Matsumoto T, Nishiguchi T, Kanai H, Utani K, Matsumura Y, Imamura S
Applied Catalysis A: General, 276(1-2), 267, 2004